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1.1 Tổng quan về màng mỏng dẫn điện trong suốt 10
1.2 Vật liệu ZnO 10
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1.3 Cấu trúc vùng năng lượng của ZnO 17
1.4 Tính chất điện và quang của ZnO 18
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2.1 ZnO pha tạp loại p 28
2.2 ZnO pha tạp nitơ (ZnO:N) 30
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2.3 ZnO đồng pha tạp donor – acceptor 34
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3.1 Khái niệm về phún xạ 38
3.2 Phún xạ magnetron phẳng 38
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DANH MỤC CÁC BẢNG
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Lu 7
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\P8&10
Lu 9
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1.2 Vật liệu ZnO
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Trích đoạn Phương pháp phân tích phổ tán xạ ngược Rutherford (backscattering Các bước chuẩn bị trước khi phún xạ tạo màng Chế tạo tiếp xúc p-ZnO:(In, N)/n-Si

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